Numerical Study and Performance Analyses of Mems-Based Particle Velocity Sensor with Combined Inclined Rib Pair

English

Journal of Thermal Science

热科学学报

Numerical Study and Performance Analyses of Mems-Based Particle Velocity Sensor with Combined Inclined Rib Pair

ZHU Linhui, ZENG Yibo, GUO Hang

Numerical Study and Performance Analyses of Mems-Based Particle Velocity Sensor with Combined Inclined Rib Pair

ZHU Linhui, ZENG Yibo, GUO Hang

热科学学报 . 2022, (5): 1503 -1517 . DOI: 10.1007/s11630-022-1500-5